| Diameter | 2″ | 3″ | 4″ | 5″ | 6″ | 8″ |
| Growth Method | FZ | |||||
| Orientation | < 1-0-0 > , < 1-1-1 > | |||||
| Type/Dopant | Intrinsic, N Type/Phos, P Type/Boron | |||||
| Thickness (um) | 279 | 380 | 525 | 625 | 675 | 725 |
| Thickness Tolerance | Standard ± 25um | ±50um | ||||
| Resistivity(Ohm-cm) | 1000-20000, Maximum Capabilities>20000, and 1-5 | |||||
| Surface Finished | P/E , P/P, E/E, G/G | |||||
| TTV (um) | Standard < 10 um | |||||
| Bow/Warp (um) | Standard <40 um | <50um | ||||
| Particle | <10@0.3um | |||||